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High-Speed Waveguide Integrated Si Photodetector on SiN-SOI Platform for Short Reach Optical Interconnect

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We demonstrate high-speed Silicon pin photodetector integrated with SiN waveguide. Optimized waveguide-photodetector coupling yields maximum responsivity of 0.44A/W and highest ever bandwidth of 15.5GHz for waveguide integrated Silicon photodetector.

© 2018 The Author(s)

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