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High-yield ultra-low losses Si3N4 microresonators for energy-efficient nonlinear photonics

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Abstract

High confinement and ultra-low losses are required to generate Kerr frequency combs at telecom wavelengths, which is challenging for thick anomalous-dispersion Si3N4 waveguides. We report the fabrication of ultra-high-Q (>6x106) Si3N4 micro-resonators for nonlinear photonics.

© 2019 The Author(s)

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