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Third-Order Nonlinear Optical Properties of ALD Grown TiO2 Thin Films

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Abstract

Nonlinear index values as high as 1±.1x10-9 cm2/W were measured of ALD based TiO2 films. The 1000-fold increase in the index is believed to be due to the incorporation of nitrogen during growth.

© 2019 The Author(s)

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