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Light manipulation in a monolithic silicon photonics platform leveraging 3D coupling and decoupling

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Abstract

We leverage phase-matching between front-end-of-line (FEOL)/middle-of-line (MOL) and back-end-of-line (BEOL) stacks for flexible light control in a monolithic Si photonics platform. The efficient vertical coupling/decoupling enables novel devices with unique functions.

© 2020 The Author(s)

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