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Conferences > FiO > 2020 > FW4D > FW4D.6

High-Q Ultrasensitive Spiral-Based Coupled-Resonator Device on a Si3N4 Platform for Sensing Applications

Xi Wu, Tianren Fan, Ali A. Eftekhar, Amir H. Hosseinnia, and Ali Adibi

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Abstract

We report high-Q ultrasensitive Si3N4 racetrack-spiral and spiral-spiral coupled-resonator devices with bulk sensitivity of 132 nm/RIU for sensing applications. We demonstrate Qs of 560,000 (263,000) at ~1300 nm wavelength with air (water) cladding.

© 2020 The Author(s)

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