Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Effect of Pre-amorphization and Annealing on the Performance of a Silicon Optical Phase Shifter

Not Accessible

Your library or personal account may give you access

Abstract

The effect of pre-amorphization and annealing on the silicon optical PN phase shifter performance is studied. It is observed that the absorption has a larger dependency on the process parameters compared to the phase shift.

© 2020 The Author(s)

PDF Article
More Like This
Performance of a Pre-amorphized Traveling-wave Silicon Optical Modulator

Darpan Mishra, Manoranjan Minz, and Ramesh Kumar Sonkar
T4A.185 Asia Communications and Photonics Conference (ACP) 2021

Laser Annealing of Amorphous Silicon Core Optical Fibers

N. Healy, S. Mailis, T. D. Day, P. J. A. Sazio, J. V. Badding, and A. C. Peacock
STu1D.1 Specialty Optical Fibers (SOF) 2012

Impact of optical free-carrier generation on the performance of SOI phase shifters

Clemens J. Kriickel, Joris Van Campenhout, and Dries van Thourhout
SM2J.3 CLEO: Science and Innovations (CLEO:S&I) 2020

Poster Presentation

Media 1: PDF (861 KB)     
Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.