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Conferences > FiO > 2021 > FTh6B > FTh6B.4

Silicon Waveguides and Resonators with Sub-0.1 dB/cm Propagation Loss and Over 7 Million Q in a Foundry Process

Deniz Onural, Hayk Gevorgyan, Bohan Zhang, Anatol Khilo, and Miloš A. Popović

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Abstract

Propagation loss is characterized vs. waveguide width in a 220 nm silicon photonics foundry platform to form a compact model. Test paperclips and racetrack resonators with quality factors up to 7.6 million reveal losses as low as 0.064 dB/cm.

© 2021 The Author(s)

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