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Compact, Pull-in-Free Electrostatic MEMS Actuated Tunable Ring Resonator for Optical Multiplexing

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Abstract

We present an optical wavelength division multiplexer enabled by a ring resonator tuned by MEMS electrostatic actuation. Analytical analysis, simulation and fabrication are discussed leading to results showing controlled tuning greater than one FSR.

© 2021 The Author(s)

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