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Conferences > FiO > 2021 > FW6B > FW6B.2

Low loss, low power, silicon nitride PZT stress-optic microresonator modulator for control functions

Jiawei Wang, Qiancheng Zhao, Ryan Q. Rudy, and Daniel J. Blumenthal

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Abstract

We demonstrate a PZT Si3N4 ring-modulator with 0.03 dB/cm loss, 7.1 million Q and 20nW power consumption. For feedback control, ER = 14 dB, VπLα = 1.3 V·dB, 1.6 pm/V tuning, DC-20 MHz bandwidth is measured.

© 2021 The Author(s)

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