Demonstration of Nanoscale Patterning of Thin-Layer Beta-Barium Borate Through Anhydrous Fabrication

Mohamed Sabry Mohamed; Siamak Forouhar

doi:10.1364/FIO.2021.JTu7A.4

Frontiers in Optics + Laser Science 2021
Technical Digest Series (Optica Publishing Group, 2021),
paper JTu7A.4
•https://doi.org/10.1364/FIO.2021.JTu7A.4

Demonstration of Nanoscale Patterning of Thin-Layer Beta-Barium Borate Through Anhydrous Fabrication

Mohamed Sabry Mohamed and Siamak Forouhar

Frontiers in Optics 2021

Washington, DC United States
1–4 November 2021
ISBN: 978-1-55752-308-2

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Joint Postdeadline Session I (JTu7A)

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M. S. Mohamed and S. Forouhar, "Demonstration of Nanoscale Patterning of Thin-Layer Beta-Barium Borate Through Anhydrous Fabrication," in Frontiers in Optics + Laser Science 2021, C. Mazzali, T. (T.-C.) Poon, R. Averitt, and R. Kaindl, eds., Technical Digest Series (Optica Publishing Group, 2021), paper JTu7A.4.

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Abstract

We demonstrate sub-micron lithographic patterning of nonlinear β-barium borate layers, obtaining features below 100 nm through a novel anhydrous fabrication process. This paves the way for visible- and ultraviolet-range chip-scale photonic devices.

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