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Conferences > FiO > 2022 > FM3C > FM3C.3

Spectral Ellipsometer based on the Polarization-Holographic Diffraction Element

B. Kilosanidze, G. Kakauridze, I. Chaganava, I. Kobulashvili, and Yu. Mshvenieradze

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Abstract

A new method of determining ellipsometric parameters and their dispersion based on only one polarization-holographic diffraction element is suggested by simultaneous measurement of the intensities of the diffraction orders and by using the appropriate software.

© 2022 The Author(s)

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