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Conferences > FiO > 2022 > FM5C > FM5C.4

Fabrication and Characterization of Large Area Plasmonic Metasurface Lenses

D. Bruce Burckel and Katherine M. Musick

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Abstract

Metasurface lenses are fabricated using membrane projection lithography following a CMOS-compatible process flow. The lenses are 10-mm in diameter and employ 3-dimensional unit cells designed to function in the mid-infrared spectral range.

© 2022 The Author(s)

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