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Conferences > FiO > 2022 > FW1E > FW1E.3

Flexible Wafer-Scale Silicon-Photonics Fabrication Platform

Milica Notaros, Thomas Dyer, Ashton Hattori, Kevin Fealey, Seth Kruger, and Jelena Notaros

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Abstract

We develop a wafer-scale CMOS-compatible platform and fabrication process that results in 300-mm-diameter flexible wafers, and experimentally demonstrate key functionality at visible wavelengths, including chip coupling, waveguide routing, and passive devices.

© 2022 The Author(s)

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