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Conferences > FiO > 2023 > FM6D > FM6D.5

Ultra-high Q Alumina Optical Microresonators in the UV and Blue Bands

Chengxing He, Yubo Wang, Carlo Waldfried, Guangcanlan Yang, Jun-Fei Zheng, Shu Hu, and Hong X. Tang

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Abstract

We report ultra-low-loss photonic waveguides and resonators patterned from alumina thin films prepared by a highly scalable atomic layer deposition (ALD) process. We demonstrate ultra-high Q factor of 1.5×106 at 390 nm, a record value at UV bands, and 1.9×106 at 488.5 nm.

© 2023 The Author(s)

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