Meter-Class Infrared Deflectometry for Visibly Non-Specular Surface Metrology

Joel Berkson; Zack Hatfield; Alex St. Peter; Henry Quach; Emily Rodriguez; Naomi Nguyen; Wyatt Ellis; Kevin Derby; Christian Davila-Peralta; Justin Hyatt; Dae Wook Kim; Dae Wook Kim

doi:10.1364/FREEFORM.2021.JTu2B.3

OSA Optical Design and Fabrication 2021 (Flat Optics, Freeform, IODC, OFT)
OSA Technical Digest (Optica Publishing Group, 2021),
paper JTu2B.3
•https://doi.org/10.1364/FREEFORM.2021.JTu2B.3

Meter-Class Infrared Deflectometry for Visibly Non-Specular Surface Metrology

Joel Berkson, Zack Hatfield, Alex St. Peter, Henry Quach, Emily Rodriguez, Naomi Nguyen, Wyatt Ellis, Kevin Derby, Christian Davila-Peralta, Justin Hyatt, and Dae Wook Kim

Freeform Optics 2021

Washington, DC United States
27 June–1 July 2021
ISBN: 978-1-943580-88-0

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Freeform Testing and Laser Processing (Joint Freeform and OF&T) (JTu2B)

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J. Berkson, Z. Hatfield, A. S. Peter, H. Quach, E. Rodriguez, N. Nguyen, W. Ellis, K. Derby, C. Davila-Peralta, J. Hyatt, and D. W. Kim, "Meter-Class Infrared Deflectometry for Visibly Non-Specular Surface Metrology," in OSA Optical Design and Fabrication 2021 (Flat Optics, Freeform, IODC, OFT), F. Capasso, W. Chen, P. Dainese, J. Fan, J. DeGroote Nelson, F. Duerr, J. Rogers, J. Rolland, P. Clark, R. Pfisterer, H. Rehn, S. Thibault, M. Jenkins, D. Wook Kim, and N. Trela-McDonald, eds., OSA Technical Digest (Optica Publishing Group, 2021), paper JTu2B.3.

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Abstract

Large, slow freeform optics are challenging to measure, especially if their surfaces are non-specular in the visible; however, using deflectometry with a thermal source allows measurement of both rough and freeform surfaces to high precision.

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