Abstract

Since it was first proposed one and a half decades ago, the coordinate transformation method of Chandezon et al.¹ (the C method) for analyzing surface-relief gratings has gone through many stages of improvement and extension.^2-10 By now, it is truly one of the most efficient and versatile theoretical tools for modeling gratings of arbitrary permittivity and (reasonably) arbitrary profiles. The most distinctive features of the C method, not shared with any other rigorous grating methods, are its virtually uniform convergence with respect to the incident polarization (TE, TM, or conical) and the medium permittivity (dielectric or metal), and its perfect suitability for modeling multilayer-coated gratings.

© 1996 Optical Society of America