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  • Topical Meeting on Industrial Applications of Computed Tomography and NMR Imaging
  • Technical Digest Series (Optica Publishing Group, 1984),
  • paper MC6
  • https://doi.org/10.1364/IACT.1984.MC6

True 3-D Transmission Electron Microscopy

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Abstract

A transmission electron microscope operating in the 100kV range has been designed to perform three dimensional analysis of relatively thick specimens. Specimens can be up to 8mm in diameter and over one micrometer thick, so that the third dimension is useful at sub-micron resolutions. We call our technique microtomography.

© 1984 Optical Society of America

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