Metastable Nitrogen Energy Transfer Emission Spectroscopy: Recent Advances and Applications

J. W. Mitchell; P. K. Wittman

doi:10.1364/ICOL.1984.FD6

International Conference on Luminescence - 1984
Technical Digest Series (Optica Publishing Group, 1984),
paper FD6
•https://doi.org/10.1364/ICOL.1984.FD6

Metastable Nitrogen Energy Transfer Emission Spectroscopy: Recent Advances and Applications

J. W. Mitchell and P. K. Wittman

International Conference on Luminescence 1984

Madison, Wisconsin United States
13–17 August 1984
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J. W. Mitchell and P. K. Wittman, "Metastable Nitrogen Energy Transfer Emission Spectroscopy: Recent Advances and Applications," in International Conference on Luminescence - 1984, Technical Digest Series (Optica Publishing Group, 1984), paper FD6.

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Abstract

Ultrasensitive operationally easy, on-line analytical techniques are required to monitor the fabrication and processing of ultrahigh purity electronic materials. Where inert atmospheres free of oxygen and carbon contamination are required, metastable transfer emission spectroscopy (MTES) is suited ideally for continuous monitoring of gas purity.

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