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Mask Synthesis for Diffraction-Limited Waveguide Luneburg Lenses1

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Abstract

An integrated optical circuit for RF signal spectral analysis requires a near diffraction-limited lens to perform the Fourier transform.1,2 A thin-film waveguide Luneburg lens3 using Ta2O5 in the lens region with Corning 7059 waveguide on thermally-oxidized silicon substrate is a low-cost approach providing for integration with a surface elasto-optic spatial modulator and a waveguide coupled photodetector array in the substrate. Waveguide Luneburg lenses are formed by sputtering high-index films through a circular mask with a shaped edge.

© 1978 Optical Society of America

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