Abstract

Cornell University has received a grant for $5,000,000 over a five year period to establish on its Ithaca campus the National Research and Resource Facility for Submicron Structures. This unique facility will be a resource for developing and applying technology for producing submicron patterns, and will provide a new focus for workers in this field at Cornell and in other university, government, and industrial institutions.

© 1978 Optical Society of America