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Conferences > IGWO > 1980 > TuD > TuD3

Fabrication of Strip Waveguides in LinbO3 by Combined Metal Diffusion and ION Implantation

J. Heibei and E. Voges

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Abstract

Optical waveguides in LiNbO3 are commonly fabricated by the in-diffusion of thin Ti layers /1/, and suppression of the accompaning out-diffusion of Li2O by additional means /2/. This technique yields low-loss optical waveguides, and embedded strip waveguides are easily produced by a suitable patterning of the metal layer.

© 1980 Optical Society of America

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