Abstract

Free-space optical components and systems can be fabricated using planar techniques such as pattern generation using an electron-beam writer, photolithography, reactive ion etching and thin film deposition. This allows to integrate several optical components such as lenses and beamsplitters on one side of a single substrate [1]; see Fig. 1. The substrate material can be quartz glass or silicon, for example. The light propagates inside the substrate (or alternatively between two reflective substrates) along a zigzag path, thereby hitting the components (see figure below). Using this approach, it is possible to build optical imaging systems for two-dimensional inputs and outputs. Fig. 2 shows an experimental result for an integrated 4-f imaging system.

© 1990 Optical Society of America