Abstract

From their first lasing demonstration in the mid-1970s, excimer lasers have rapidly evolved and now have excellent potential for a wide variety of military and civilian applications. They are the most efficient ultraviolet lasers to date and recent technology advancements have shown they are scalable to large pulse energies and possibly high average powers. Furthermore, at moderate average powers, very long operating lifetimes have been demonstrated with discharge pumped excimers. Pulse energy scaling for electron-beam pumped excimers has been highly successful with multikilojoule energies obtained in both XeF at 353 nm and KrF at 248 nm. Discharge scaling has also been successful to tens of joules. Substantial progress has been made in large area cathodes with very uniform current densities. Optical coatings at this short wavelength are extremely challenging, and although progress has been good, developments are needed to enable long life at modest fluences in thecorrosive halogen environments. Average power technologies are being pursued by many groups and progress will be highlighted.

© 1986 Optical Society of America