Catadioptric Microlithographic Reduction Lenses

David M. Williamson

doi:10.1364/IODC.1994.ONDE.428

International Optical Design Conference
Technical Digest Series (Optica Publishing Group, 1994),
paper ONDE.428
•https://doi.org/10.1364/IODC.1994.ONDE.428

Catadioptric Microlithographic Reduction Lenses

David M. Williamson

International Optical Design Conference 1994

New York United States
6–9 June 1994
ISBN:

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D. M. Williamson, "Catadioptric Microlithographic Reduction Lenses," in International Optical Design Conference, Technical Digest Series (Optica Publishing Group, 1994), paper ONDE.428.

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Abstract

A review of microlithographic optical design describes the benefits of catadioptric systems. One such system is described that operates without obscuration of field or aperture with a single mirror and beamsplitter.

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