Abstract

High quality lenses have reached a standard where wavefront tolerances of a few nanometers for transmission and surface figure of individual components are necessary. The standard measuring tool in production is digital interferometry. To satisfy the demands of current and future production quality interferometric equipment has to provide an overall accuracy below one nanometer under fabrication environment. This is reasonable especially if „workman's rule“ is applied demanding a tolerance/resolution factor for metrology of ≥10:1.

© 1998 Optical Society of America