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Polycapillary Optics in X-Ray Microanalysis, Patterning, and Imaging

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Abstract

Focusing and collimation of x-rays over a broad energy and angular range with polycapillary optics provides new opportunities for micro x-ray fluorescence (MXRF), micro x-ray diffraction (MXRD), high resolution energy dispersive microanalysis with SEM, TEM, x-ray and ion microprobes as well as x-ray lithography, medical imaging and x-ray astronomy. The current status of such studies is reviewed.

© 1998 Optical Society of America

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