Deformable micromirror devices for video-projection

Eugene Curatu; Louis Demers; Francis Picard

doi:10.1364/IODC.1998.LFD.3

International Optical Design Conference
Technical Digest Series (Optica Publishing Group, 1998),
paper LFD.3
•https://doi.org/10.1364/IODC.1998.LFD.3

Deformable micromirror devices for video-projection

Eugene Curatu, Louis Demers, and Francis Picard

International Optical Design Conference 1998

Kailua-Kona, Hawaii United States
8–12 June 1998
ISBN:

From the session
Integrated Optics (LFD)

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E. Curatu, L. Demers, and F. Picard, "Deformable micromirror devices for video-projection," in International Optical Design Conference, Technical Digest Series (Optica Publishing Group, 1998), paper LFD.3.

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Abstract

A simplified representation of a typical micro-mirror is shown in Figure 1. The micro-mirror is a highly reflective plate suspended by hinges. Four electrodes lie underneath the mirror: two address electrodes and two landing electrodes.

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