Abstract

Precision laser scanning systems are often characterized by the need to scan large fields with small spots at high speed and accuracy. Performance limitations of these systems are due in part to the tendency of well corrected imaging optics to require a large entrance pupil diameter. This in turn requires large high inertia scan mirrors which adversely affect the system dynamic performance. In general, the dynamic performance will be optimum when the inertia is at or near a minimum.

© 1998 Optical Society of America