Projection Lens Design using Double Telecentric Format

Cheng-Hsi Miao

doi:10.1364/IODC.1998.LThC.2

International Optical Design Conference
Technical Digest Series (Optica Publishing Group, 1998),
paper LThC.2
•https://doi.org/10.1364/IODC.1998.LThC.2

Projection Lens Design using Double Telecentric Format

Cheng-Hsi Miao

International Optical Design Conference 1998

Kailua-Kona, Hawaii United States
8–12 June 1998
ISBN:

From the session
Lens Design Examples 2 (LThC)

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C. Miao, "Projection Lens Design using Double Telecentric Format," in International Optical Design Conference, Technical Digest Series (Optica Publishing Group, 1998), paper LThC.2.

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Abstract

The Double Telecentric system has many advantages over non-telecentric optical system. The inspection system in the Semiconductor or Flat Panel production are always need high precision and Low Distortion lens system. The Double Telecentric system meets that critical requirements while provides some other benefits such as insensitive of Magnification along the image plane, Uniform illumination, and long working distance.

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