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Rotational error correction in lateral shearing interferometry for freeform surface measurement

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Abstract

A lateral shearing interferometer (LSI) is able to be a powerful solution to measure a complex freeform surface since it requires no reference. It, however, has some issues to be resolved before it can be implemented. One of them is the orthogonality problem between two shearing directions in LSI. Previous wavefront reconstruction algorithms assume that the shearing directions are perfectly orthogonal to each other and lateral shear is obtained simultaneously in the sagittal and tangential directions. For practical LSI, however, it is hard to guarantee perfect orthogonality between two shearing directions. Motivated by this, we propose a new algorithm that can correct the rotational inaccuracy.

© 2014 Optical Society of America

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