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Conferences > IODC > 2017 > IM2A > IM2A.4

Prediction and validation of the polarization performance of high-numerical aperture inspection lenses

Stephan Fahr, Jan Werschnik, Matthias Bening, and Tim Baldsiefen

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Abstract

In this work, we show how to predict the polarization-performance of high-numerical aperture optical systems. Various important influences, such as coating-induced phase change, stress induced birefringence, or the quality of the raw material are investigated.

© 2017 Optical Society of America

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