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Conferences > IPNRA > 2007 > IMC > IMC3
  • Integrated Photonics and Nanophotonics Research and Applications / Slow and Fast Light
  • OSA Technical Digest (CD) (Optica Publishing Group, 2007),
  • paper IMC3
  • •https://doi.org/10.1364/IPNRA.2007.IMC3

Compact 90° Bends and Splitters for Silicon Rib Waveguides

Yusheng Qian, Jiquo Song, Seunghyun Kim, and Gregory P. Nordin

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Abstract

We report the design, fabrication, and characterization of polymer-filled trench-based 90 degree bends and splitters for silicon rib waveguides. These are used to create compact splitter and bend networks for microcantilever array sensors.

© 2007 Optical Society of America

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