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Conferences > IPNRA > 2007 > ITuE > ITuE3
  • Integrated Photonics and Nanophotonics Research and Applications / Slow and Fast Light
  • OSA Technical Digest (CD) (Optica Publishing Group, 2007),
  • paper ITuE3
  • •https://doi.org/10.1364/IPNRA.2007.ITuE3

Responsivity and Transient Response of 1.5 μm-Infrared Si Photodiodes Fabricated in a CMOS Line

M. W. Geis, S. J. Spector, M. E. Grein, R. T. Schulein, J. U. Yoon, D. M. Lennon, F. Gan, F. X. Kartner, and T. M. Lyszczarz

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Abstract

CMOS-compatible, Si waveguide photodiodes, exhibit responsivity of 0.33 to 21 A W−1 and have transient response from <12 to 16 ps when exposed to 1.5-μm radiation. The diode’s characteristics depend upon processing and bias voltage.

© 2007 Optical Society of America

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