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Conferences > IPNRA > 2009 > IWA > IWA1

InGaAsP/InP based Flattened Ring Resonators with Etched Beam Splitters

Erik J. Norberg, John S. Parker, Uppili Krishnamachari, Robert S. Guzzon, and Larry A. Coldren

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Abstract

A novel flattened ring resonator design utilizing Etched Beam Splitters (EBS) in InGaAsP/InP is purposed and demonstrated. A multiple-thickness hard mask that compensates for RIE-lag realizes waveguides and EBS in a single etch step.

© 2009 Optical Society of America

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