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Numerical modeling of deeply etched semiconductor rib waveguides with large mode size: comparison with experimental results

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Abstract

Semiconductor rib waveguides with large mode sizes are highly desirable for compatibility with single mode optical fibers. Although the favorable modeling tool is the beam propagation method (BPM) of various forms,1–3 BPM is not always efficient due to large computational window size needed for accurate modeling of such structures. In this paper, an explicit-finite-difference-BPM3 employing a non-uniform-mesh is used to study such structures and numerical calculations are verified by experimental results.

© 1991 Optical Society of America

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