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Micro-Mechanical Structures As Integrated Optical Sensor Elements

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Abstract

As optical channel waveguides and part of sensor circuits, micro-mechanical cantilevers and bridges have been fabricated upon Si substrates. The waveguides have a sandwiched layer structure of SiO2/Al2O3/SiO2 and possess very good optical wave-guiding properties1.

© 1992 Optical Society of America

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