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Integrated-Optic Displacement Sensor Using Linearly Focusing Grating Couplers

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Abstract

Integration of optical interferometers for displacement sensing is very attractive because of its high resolution, stability, device compactness, etc. In fact, there have been several reports on integrated-optic vibration sensors [1,2] or displacement/position sensor [3], in which mirror displacement along the beam propagation direction is measured with resolution of sub-micrometer. Besides those sensors, a grating coupler consisting of a double grating has been investigated for measuring a grating scale displacement [4]. In this paper, we propose and demonstrate a new type of integrated-optic sensor device. The proposed sensor is constructed by integrating a slab waveguide, a pair of linearly focusing grating couplers (LFGCs) [5] and a pair of photodiodes (PDs) onto a Si substrate, and is capable of the sensing of the displacement of a grating scale which is moving laterally to the radiated beam from the sensor head.

© 1993 Optical Society of America

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