New Types of Singlemode (Movable) and Multmode (60-μm thick) SOI Waveguides Fabricated using Silicon Micromachining Technology

S.C. Kan; T.T.H. Eng; S.Y.S. Sin; J.Y.L. Ho; I.H.M. Liem; P.W.L. Chan; G.K.L. Wong

doi:10.1364/IPR.1996.ITuD2

Integrated Photonics Research
1996 OSA Technical Digest Series (Optica Publishing Group, 1996),
paper ITuD2
•https://doi.org/10.1364/IPR.1996.ITuD2

New Types of Singlemode (Movable) and Multmode (60-μm thick) SOI Waveguides Fabricated using Silicon Micromachining Technology

S.C. Kan, T.T.H. Eng, S.Y.S. Sin, J.Y.L. Ho, I.H.M. Liem, P.W.L. Chan, and G.K.L. Wong

Integrated Photonics Research 1996

Boston, Massachusetts United States
ISBN: 1-55752-439-4

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Silicon Wavelengths and Interconnect Technologies (ITuD)

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S. C. Kan, T. T. H. Eng, S. Y. S. Sin, J. Y. L. Ho, I. H. M. Liem, P. W. L. Chan, and G. K. L. Wong, "New Types of Singlemode (Movable) and Multmode (60-μm thick) SOI Waveguides Fabricated using Silicon Micromachining Technology," in Integrated Photonics Research, Vol. 6 of 1996 OSA Technical Digest Series (Optica Publishing Group, 1996), paper ITuD2.

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Abstract

Advantages of integrated optical devices based on silicon technology have been well recognized and discussed [1]. In particular, excellent properties of waveguides based on Silicon-On-Insulator (SOI) structures have been demonstrated. In this paper, we report on the demonstration of two new types of SOI waveguides for various applications.

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