Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Actuated micromachined microreflector with two degrees of freedom for integrated optical systems

Not Accessible

Your library or personal account may give you access

Abstract

The growing optical communications and measurement market requires low-cost, high- performance optoelectronic modules such as laser-to-fiber couplers, tunable lasers, scanners, interferometers, etc. Unlike integrated electronic circuits, integrated optical systems require precise alignment of components. A misalignment of less than 1 pm can dramatically decrease system performance. While silicon-optical-bench (SOB) technology provides for hybrid integration of semiconductor lasers, lenses, and optical fibers on a silicon chip, it is typically limited to +I pm alignment tolerances (without externa1 adjustment). Another limitation is the lack of on-chip actuated optical components (such as mirrors, gratings, lenses, etc.) As a result, SOB technology applications have been limited to simple systems with no more than three or four components. To overcome these limitations a micromachined free-space optical platform has been proposed [ 1, 21. By combining micromachined movable optical components with lasers, lenses, and fibers on a silicon substrate, we can produce complex self-aligning optical systems on a chip. In order to function in a self-contained optical module, the micromachined components must have sufficient precision and, where required, must have on-chip actuation. In this paper, we present an actuated micromachined microreflector with two degrees of freedom and on-chip resonant electrostatically driven impact actuations.

© 1996 Optical Society of America

PDF Article
More Like This
Integrated laser-to-fiber coupling module using a micromachined alignment mirror

M. Daneman, O. Solgaard, N. Tien, R.S. Muller, and K. Y. Lau
CWL3 Conference on Lasers and Electro-Optics (CLEO) 1995

Vertical adjustment in surface-micromachined free-space micro-optical bench

L. Y. Lin, J. L. Shen, S. S. Lee, and M. C. Wu
CFC5 Conference on Lasers and Electro-Optics (CLEO) 1996

Distributed feedback lasers integrated with micromachined wavelength meters for dense WDM systems

S.S. Lee, L. Y. Lin, and M. C. Wu
CFG2 Conference on Lasers and Electro-Optics (CLEO) 1996

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2022 | Optica Publishing Group. All Rights Reserved