Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Design and Fabrication of High-Performance Silicon Micromachined Resonant Microscanners for Optical Scanning Applications

Not Accessible

Your library or personal account may give you access

Abstract

Resonant and galvanometric optical scanners have long been used for various scientific and industrial applications. The typical attributes of these scanners are fast scan speeds, large scan angles, and low mass. In this paper, we present the design and fabrication of a silicon-surface-micromachined resonant microscanner that has a large scan angle, a fast scan rate, extremely small mass, and a low operating power. The integration of the scanner optics and the driving motor(s) and potentially the electronics is carried out as part of the fabrication process, which avoids major technical challenges such as the assembly of mirrors and motors in the bulk optical scanner system. The compact microscanner also makes packaging a much easier task. With the scanner module integrated on a silicon chip, the microscanner can be packaged in a vacuum which alleviates the adverse effects from the environment. Vacuum packaging is, however, very difficult and costly to do in a bulk-scanner system. We will discussed single-mirror scanners that are capable of high-speed scanning with a large scan angle. These single-mirror scanners can be combined to form more complicated microscanners like the system shown in Fig. 1, which is an SEM micrograph of one of the microscanner systems that we have fabricated. The two-mirror, two-axis raster scanner finds a wide range of applications in areas such as communications, medicine, and entertainment, among others.

© 1996 Optical Society of America

PDF Article
More Like This
Actuated micromachined microreflector with two degrees of freedom for integrated optical systems

Michael J. Daneman, Norman C. Tien, Olav Solgaard, Kam Y. Lau, and Richard S. Muller
IWG2 Integrated Photonics Research (IPR) 1996

Surface-Micromachined 2D Optical Scanners with High-Performance Single-Crystalline Silicon Micromirrors

Guo-Dung J. Su, Hung Nguyen, Pam Paterson, Hiroshi Toshiyoshi, and Ming C. Wu
PD21 Conference on Lasers and Electro-Optics (CLEO) 2000

A Surface and Bulk Micromachined Angular Vertical Combdrive for Scanning Micromirrors

W. Piyawattanametha, P. Patterson, M. Wu, D. Hah, and H. Toshiyoshi
TuN1 Optical Fiber Communication Conference (OFC) 2003

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2022 | Optica Publishing Group. All Rights Reserved