Abstract
We demonstrate a SiGe avalanche photodetector grown on a silicon-on-insuiator(SOI) passive waveguide. The thick SOI waveguide couples the light from an optical fiber into the SiGe detector with strain-limited thin absorption region. The detector exhibits low dark current, sharp breakdown and an external responsivity of 0.2A/W at 1.3μm.
© 1998 Optical Society of America
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