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Optica Publishing Group
  • Integrated Photonics Research
  • OSA Technical Digest (Optica Publishing Group, 1998),
  • paper ITuK4

Polarization-Insensitive Vycor-Based Optical Waveguide for Planar Lightwave Circuits on Silicon Substrate Fabricated by Aerosol Flame Deposition

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The glass film produced by FHD (Flame Hydrolysis Deposition) [1] or CVD (Chemical Vapor Deposition)[2] method has high-silica composition similar to that of an optical fiber and hence low propagation losses of planar optical waveguides may be achieved easily.

© 1998 Optical Society of America

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