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Highly Reproducible Methods for Fabrication of InP Reflective Arrayed Waveguide Grating Demultiplexer

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We have designed and fabricated a reflective type of InP-based arrayed waveguide grating demultiplexer using highly reproducible and novel methods, such as lithography, metal coating for high reflection, and lift-off, not cleaving a chip in half.

© 2000 Optical Society of America

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