Micro-Electro-Mechanically Actuated Integrated Optic Switch for N×N Optical Cross-Connect Matrix Array

Ivan Shubin; Patrick LiKamWa

doi:10.1364/IPR.2000.IThA3

Integrated Photonics Research
OSA Trends in Optics and Photonics (Optica Publishing Group, 2000),
paper IThA3
•https://doi.org/10.1364/IPR.2000.IThA3

Micro-Electro-Mechanically Actuated Integrated Optic Switch for N×N Optical Cross-Connect Matrix Array

Ivan Shubin and Patrick LiKamWa

Integrated Photonics Research 2000

Québec City Canada
ISBN: 1-55752-643-5

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Optical Crossconnects 1 (IThA)

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I. Shubin and P. LiKamWa, "Micro-Electro-Mechanically Actuated Integrated Optic Switch for N×N Optical Cross-Connect Matrix Array," in Integrated Photonics Research, T. Li, ed., Vol. 45 of OSA Trends in Optics and Photonics (Optica Publishing Group, 2000), paper IThA3.

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Abstract

A micro-opto-mechanical 1×2 switch has been achieved using SiON planar waveguide technology. The operational principle of the switch is based on the mechanical deflection of the cantilever beam due to electrostatic interaction. The first functional results are reported.

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