First demonstration of a 980nm oxide confined laser with integrated spot size converter

Kurt De Mesel; Carl Sys; Steven Verstuyft; Ingrid Moerman; Peter Van Daele; Roel Baets

doi:10.1364/IPR.2000.IThG1

Integrated Photonics Research
OSA Trends in Optics and Photonics (Optica Publishing Group, 2000),
paper IThG1
•https://doi.org/10.1364/IPR.2000.IThG1

First demonstration of a 980nm oxide confined laser with integrated spot size converter

Kurt De Mesel, Carl Sys, Steven Verstuyft, Ingrid Moerman, Peter Van Daele, and Roel Baets

Integrated Photonics Research 2000

Québec City Canada
ISBN: 1-55752-643-5

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Semiconductor Lasers and Detectors (IThG)

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K. De Mesel, C. Sys, S. Verstuyft, I. Moerman, P. Van Daele, and R. Baets, "First demonstration of a 980nm oxide confined laser with integrated spot size converter," in Integrated Photonics Research, T. Li, ed., Vol. 45 of OSA Trends in Optics and Photonics (Optica Publishing Group, 2000), paper IThG1.

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Abstract

A new technique for the monolithic integration of a laser with a spot size converter is presented. The introduction of the wet thermal selective oxidation of an Al_xGai_1−xAs layer with a high Al-composition simplifies the fabrication to one planar epitaxial growth step and one noncritical conventional etch. We report on the design, fabrication and performance of a 980nm InGaAs/GaAs strained quantum well tapered oxide confined laser with CW threshold currents of 25mA and differential quantum efficiencies of 21%/facet. The integrated spot size converter effectively reduced the horizontal and vertical FWHM to 7.5° and 13.5°, respectively.

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