Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Silicon rich nitride thin films and waveguides

Not Accessible

Your library or personal account may give you access

Abstract

The material properties of silicon rich nitride thin films are presented. Waveguides have been processed with this material as a core layer using LPCVD. The optical loss has been measured in straight waveguides of varying thickness.

© 2002 Optical Society of America

PDF Article
More Like This
Hybrid strip-loaded silicon rich nitride-thin film lithium niobate waveguides for PIC applications

Toijam Sunder Meetei, Seong-Jin Son, Byeongchan Park, Yong-Tak Lee, and Nan Ei Yu
ce_p_4 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2023

Linear and nonlinear characterization of silicon/silicon-rich nitride hybrid waveguides

Xiaoyan Wang, Xiaowei Guan, Shiming Gao, Leif K. Oxenløwe, and Lars H. Frandsen
ATh3G.4 Asia Communications and Photonics Conference (ACP) 2016

Continuous-wave nonlinear optics in low-stress silicon-rich nitride waveguides

Clemens Krückel, Attila Fülöp, Peter Andrekson, and Víctor Torres-Company
W1K.4 Optical Fiber Communication Conference (OFC) 2015

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved