Silicon rich nitride thin films and waveguides

K. N. Andersen; P. C. Nielsen; W. Svendsen

doi:10.1364/IPR.2002.IThA4

Integrated Photonics Research
OSA Trends in Optics and Photonics (Optica Publishing Group, 2002),
paper IThA4
•https://doi.org/10.1364/IPR.2002.IThA4

Silicon rich nitride thin films and waveguides

K. N. Andersen, P. C. Nielsen, and W. Svendsen

Integrated Photonics Research 2002

Vancouver Canada
17–19 July 2002
ISBN: 1-55752-722-9

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K. N. Andersen, P. C. Nielsen, and W. Svendsen, "Silicon rich nitride thin films and waveguides," in Integrated Photonics Research, A. Sawchuk, ed., Vol. 78 of OSA Trends in Optics and Photonics (Optica Publishing Group, 2002), paper IThA4.

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Abstract

The material properties of silicon rich nitride thin films are presented. Waveguides have been processed with this material as a core layer using LPCVD. The optical loss has been measured in straight waveguides of varying thickness.

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