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Buried planar and channel waveguides in sapphire and Ti: sapphire by proton implantation

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Abstract

Buried, stacked planar, and channel waveguides fabricated by proton implantation into sapphire are demonstrated for the first time. The good control of implantation parameters is promising to achieve active integrated optics devices Ti3+: sapphire.

© 2004 Optical Society of America

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