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Single-mode polymer optical waveguides fabricated by electron beam direct writing

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Abstract

Single-mode optical waveguides using benzocyclobutene are fabricated by electron beam direct writing. The measured propagation losses for TE and TM polarizations at 1.55μm are 0.82dB/cm and 0.9dB/cm, respectively. Moreover, directional couplers are made for comparison.

© 2004 Optical Society of America

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