Optical Interconnect for 3D Integration of Ultra-Low Loss Planar Lightwave Circuits

Renan Moreira; Jonathon Barton; Michael Belt; Taran Huffman; Daniel Blumenthal

doi:10.1364/IPRSN.2013.IT2A.4

Advanced Photonics 2013
OSA Technical Digest (online) (Optica Publishing Group, 2013),
paper IT2A.4
•https://doi.org/10.1364/IPRSN.2013.IT2A.4

Optical Interconnect for 3D Integration of Ultra-Low Loss Planar Lightwave Circuits

Renan Moreira, Jonathon Barton, Michael Belt, Taran Huffman, and Daniel Blumenthal

Integrated Photonics Research, Silicon and Nanophotonics 2013

Rio Grande, Puerto Rico United States
14–17 July 2013
ISBN: 978-1-55752-981-7

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Integration and Platform Technologies (IT2A)

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R. Moreira, J. Barton, M. Belt, T. Huffman, and D. Blumenthal, "Optical Interconnect for 3D Integration of Ultra-Low Loss Planar Lightwave Circuits," in Advanced Photonics 2013, H. Chang, V. Tolstikhin, T. Krauss, and M. Watts, eds., OSA Technical Digest (online) (Optica Publishing Group, 2013), paper IT2A.4.

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Abstract

We demonstrate the fabrication of a low loss broadband vertical coupler for use in the 3D integration of Si₃N₄ based planar waveguides. Coupling loss of 0.2 dB was achieved and interaction between layers investigated.

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