Hybrid Silicon and EO Polymer Waveguide Modulator for High Bandwidth Application

Shiyoshi Yokoyama; Shiyoshi Yokoyama; Qiu Feng; Andrew M. Spring; Hiromu Sato; Hiroki Miura; Yukinori Inoue

doi:10.1364/IPRSN.2016.ITu2B.3

Advanced Photonics 2016 (IPR, NOMA, Sensors, Networks, SPPCom, SOF)
OSA technical Digest (online) (Optica Publishing Group, 2016),
paper ITu2B.3
•https://doi.org/10.1364/IPRSN.2016.ITu2B.3

Hybrid Silicon and EO Polymer Waveguide Modulator for High Bandwidth Application

Shiyoshi Yokoyama, Qiu Feng, Andrew M. Spring, Hiromu Sato, Hiroki Miura, and Yukinori Inoue

Integrated Photonics Research, Silicon and Nanophotonics 2016

Vancouver Canada
18–20 July 2016
ISBN: 978-1-943580-14-9

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Silicon Photonics II (ITu2B)

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S. Yokoyama, Q. Feng, A. M. Spring, H. Sato, H. Miura, and Y. Inoue, "Hybrid Silicon and EO Polymer Waveguide Modulator for High Bandwidth Application," in Advanced Photonics 2016 (IPR, NOMA, Sensors, Networks, SPPCom, SOF), OSA technical Digest (online) (Optica Publishing Group, 2016), paper ITu2B.3.

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Abstract

We report the design and fabrication of the hybrid silicon and electro-optic (EO) polymer waveguide modulator. The waveguide consists of the ultra-thin silicon core and an EO polymer cladding. The measured half-wave voltage (V_π) is sub-1 V and the propagation loss of 5.0 dB/cm. The modulator demonstrates the high-frequency RF response under 40 GHz signal.

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